SRO-706 Getter

PROGRAMMABLE SOLDER REFLOW OVEN

THERMAL REACTOR

HIGH VACUUM PACKAGE LID SEALING SYSTEM
THERMAL AND ELECTRICAL GETTER ACTIVATION

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Quick look at: SRO-706 Getter

PROGRAMMABLE SOLDER REFLOW OVEN

THERMAL REACTOR

HIGH VACUUM PACKAGE LID SEALING SYSTEM

THERMAL AND ELECTRICAL GETTER ACTIVATION

ATV’s approach using the Cold Wall Process Chamber is also applied in the SRO-706 Getter system. This system can be applied for Thermal as well for Electrical Getter processes in R&D and Production line applications. The basis for the Getter system is the successful SRO-706 series IR vacuum reflow oven. Common applications are sealing of packages with kovar caps or optical windows for gyroscopes, microbolometer and various MEMS sensors under high vacuum by applying thermal and/or electrical GETTER activation.

With its proven direct IR heating approach, ATV applies for the SRO-706 Getter system a top and bottom heating. The IR lamp arrays are independently monitored and controlled as 2 separate heating zones. This results that there is an excellent heating uniformity under vacuum when reaching a maximum temperature of 450°C during the Thermal getter process. When the Electrical getter process is applied a power of 20W can be achieved per package. In both cases the sensor or chip temperature remains below 100°C during the getter activation process. Optionally, a mass spectrometer can be added for residual gas analysis during the sealing process

With the special tooling for each different package to be processed a precise package/lid alignment is achieved. Depending on the package size, a load per run can go up to 28 devices. To achieve multiple times higher throughput the getter system can be
integrated into a glove box system including several baking ovens. When using the glove box option ATV can warrant that the process can be performed in a dry and oxygen free atmosphere.

The SRO-706 Getter is a result of in-depth cooperation with our customer base and listing to the needs of the market as you may expect form ATV.

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ATV has over 40 years experience in designing, developing equipment and process know-how which underlines our philosophy offering premium equipment and services to the semiconductor and microelectronics industry. Our scientists and support
team are dedicated to help our users getting the best return from investment of the ATV equipment.

Facts SRO-706 Getter

Technical information and figures

Technical Data SRO-706 Getter

depending on system configuration

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Footprint:     

960 x 720 x 1340mm  (LxWxH)

Weight: 

240kg (minumum configuration)

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Working Height:

950 – 1050mm adjustable

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Heated Area:    

313 x 240mm

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Chamber Lid Open/Closing:    

Manual open/close; Automatic lock/un-lock

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Heating Method:   

IR Lamp array within quartz tubes
Top Heater IR Lamp array within quartz tubes (in chamber lid integrated)

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Heating Zones:

6; PID controlled

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Cooling water supply:

Cold wall technology: Inlet max. 4bar; diff. pressure min. 2bar

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Power connection:    

3 x 400VAC, 32A, 19kW, 50-60Hz, TN-C-S (other power options available)

Common Applications SRO-706 Getter

depending on system configuration

Package sealing with high vacuum encapsulation

MEMS Cap/package lid sealing

Microbolometers

IR detectors

Gyroscopes

Thermal & electrical getter activation

Features SRO-706 Getter

depending on system configuration

Maximum temperature:    450°C

High vacuum capability: <1 x 10-6 mbar

Package and lid separated during high vacuum getter activation

Water cooled shutters in between

Package/die temperature < 100°C while 450°C lid/window temperature

RGA data right after sealing: < 4 x 10-3 mbar with getter material

RGA data long time after sealing: < 4 x 10-4 mbar with getter material

Air leak rate after 30 years: < 3 x 10-16 mbar l/s with getter material

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Options SRO-706 Getter

Additional values

RGA/ Mass spectrometer

Glovebox integration for multiple times throughput

20 Watt/Package constant DC current supply for electrical getter activation

Custom tailored package/lid tooling/fixtures

Noble gas atmosphere

Chamber pressure control

Chiller

Heated chamber walls

Barcode reader

Earth quake protection

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