SRO-706 Getter
PROGRAMMABLE SOLDER REFLOW OVEN
THERMAL REACTOR
HIGH VACUUM PACKAGE LID SEALING SYSTEM
THERMAL GETTER ACTIVATION
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Quick look at: SRO-706 Getter
PROGRAMMABLE SOLDER REFLOW OVEN
THERMAL REACTOR
HIGH VACUUM PACKAGE LID SEALING SYSTEM
THERMAL GETTER ACTIVATION
ATV’s approach using the Cold Wall Process Chamber is also applied in the SRO-706 Getter system. This system can be applied for Thermal Getter processes in R&D and Production line applications. The basis for the Getter system is the successful SRO-706 series IR vacuum reflow oven. Common applications are sealing of packages with kovar caps or optical windows for gyroscopes, microbolometer and various MEMS sensors under high vacuum by applying thermal Getter activation.
With its proven direct IR heating approach, ATV applies for the SRO-706 Getter system a top and bottom heating. The IR lamp arrays are independently monitored and controlled as 2 separate heating zones. This results that there is an excellent heating uniformity under vacuum when reaching a maximum temperature of 450°C during the Thermal getter process. The sensor or chip temperature remains below 100°C during the getter activation process. Optionally, a mass spectrometer can be added for residual gas analysis during the sealing process.
With the special tooling for each different package to be processed a precise package/lid alignment is achieved. Depending on the package size, a load per run can go up to 28 devices.
The SRO-706 Getter is a result of in-depth cooperation with our customer base and listing to the needs of the market as you may expect form ATV.

Facts SRO-706 Getter
Technical information and figures
Technical Data SRO-706 Getter
depending on system configuration
Footprint:
960 x 720 x 1340mm (LxWxH)
Weight:
240kg (minumum configuration)
Working Height:
950 – 1050mm adjustable
Heated Area:
313 x 240mm
Chamber Lid Open/Closing:
Manual open/close; Automatic lock/un-lock
Heating Method:
2 IR Lamp arrays within quartz tubes
Heating Zones:
6; PID controlled
Cooling water supply:
Cold wall technology: Inlet max. 4bar; diff. pressure min. 2bar
Common Applications SRO-706 Getter
depending on system configuration
Package sealing with high vacuum encapsulation
MEMS Cap/package lid sealing:
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Microbolometers
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IR detectors
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Gyroscopes
Thermal getter activation
Features SRO-706 Getter
depending on system configuration/optionals
Maximum temperature: 450°C
High vacuum capability
Package and lid separated during high vacuum getter activation
RGA system for gas analysis (optional configuration)

Options SRO-706 Getter
Additional values depending on application and final configuration
RGA/ Mass spectrometer
Noble gas atmosphere
Chamber pressure control
Chiller
Heated chamber walls
Barcode reader
Earth quake protection

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