SRO-706 Getter

 

PROGRAMMABLE SOLDER REFLOW OVEN

THERMAL REACTOR

HIGH VACUUM PACKAGE LID SEALING SYSTEM
THERMAL GETTER ACTIVATION

Getter right front LOGO
_08A4959
_08A4618
SRO 706 Getter glove box right side enlarged

Quick look at: SRO-706 Getter

 

PROGRAMMABLE SOLDER REFLOW OVEN

THERMAL REACTOR

HIGH VACUUM PACKAGE LID SEALING SYSTEM

THERMAL  GETTER ACTIVATION

ATV’s approach using the Cold Wall Process Chamber is also applied in the SRO-706 Getter system. This system can be applied for Thermal Getter processes in R&D and Production line applications. The basis for the Getter system is the successful SRO-706 series IR vacuum reflow oven. Common applications are sealing of packages with kovar caps or optical windows for gyroscopes, microbolometer and various MEMS sensors under high vacuum by applying thermal Getter activation.

 

With its proven direct IR heating approach, ATV applies for the SRO-706 Getter system a top and bottom heating. The IR lamp arrays are independently monitored and controlled as 2 separate heating zones. This results that there is an excellent heating uniformity under vacuum when reaching a maximum temperature of 450°C during the Thermal getter process. The sensor or chip temperature remains below 100°C during the getter activation process. Optionally, a mass spectrometer can be added for residual gas analysis during the sealing process.

 

With the special tooling for each different package to be processed a precise package/lid alignment is achieved. Depending on the package size, a load per run can go up to 28 devices. To achieve multiple times higher throughput the getter system can be integrated into a glove box system including several baking ovens. When using the glove box option ATV can warrant that the process can be performed in a dry and oxygen free atmosphere.

 

The SRO-706 Getter is a result of in-depth cooperation with our customer base and listing to the needs of the market as you may expect form ATV.

 

Facts SRO-706 Getter

Technical information and figures

Technical Data SRO-706 Getter

depending on system configuration

Footprint:     

960 x 720 x 1340mm  (LxWxH)

 

Weight: 

240kg (minumum configuration)

Working Height:

950 – 1050mm adjustable

Heated Area:    

313 x 240mm

Chamber Lid Open/Closing:    

Manual open/close; Automatic lock/un-lock

Heating Method:   

IR Lamp array within quartz tubes
Top Heater IR Lamp array within quartz tubes (in chamber lid integrated)

Heating Zones:

6; PID controlled

Cooling water supply:

Cold wall technology: Inlet max. 4bar; diff. pressure min. 2bar

Power connection:    

3 x 400VAC, 32A, 19kW, 50-60Hz, TN-C-S (other power options available)

Common Applications SRO-706 Getter

depending on system configuration

  

Package sealing with high vacuum encapsulation

MEMS Cap/package lid sealing

Microbolometers

IR detectors

Gyroscopes

Thermal getter activation

Features SRO-706 Getter

depending on system configuration/optionals

  

Maximum temperature:    450°C

High vacuum capability

Package and lid separated during high vacuum getter activation

RGA system for gas analysis (optional configuration)

 

Options SRO-706 Getter

Additional values depending on application and final configuration

RGA/ Mass spectrometer

Glovebox integration for multiple times throughput

Custom tailored package/lid tooling/fixtures

Noble gas atmosphere

Chamber pressure control

Chiller

Heated chamber walls

Barcode reader

Earth quake protection

 

Fill out the form and our latest SRO-706 Getter information will be sent to you by e-mail.

Fields marked with an * are mandatory.

Downloads

Documents "to go"

 

ATV-Technologie GmbH

Entwicklung und Vertrieb von Maschinen und Geräten für die Mikroelektronik

info {at} atv-tech.de

Johann-Sebastian-Bach-Str. 38

85591 Vaterstetten

Germany

Phone: +49 (0)8106-3050-0

Fax: +49 (0)8106-3050-99