Quick look at: SRO-706 Getter
PROGRAMMABLE SOLDER REFLOW OVEN
HIGH VACUUM PACKAGE LID SEALING SYSTEM
THERMAL AND ELECTRICAL GETTER ACTIVATION
ATV’s approach using the Cold Wall Process Chamber is also applied in the SRO-706 Getter system. This system can be applied for Thermal as well for Electrical Getter processes in R&D and Production line applications. The basis for the Getter system is the successful SRO-706 series IR vacuum reflow oven. Common applications are sealing of packages with kovar caps or optical windows for gyroscopes, microbolometer and various MEMS sensors under high vacuum by applying thermal and/or electrical GETTER activation.
With its proven direct IR heating approach, ATV applies for the SRO-706 Getter system a top and bottom heating. The IR lamp arrays are independently monitored and controlled as 2 separate heating zones. This results that there is an excellent heating uniformity under vacuum when reaching a maximum temperature of 450°C during the Thermal getter process. When the Electrical getter process is applied a power of 20W can be achieved per package. In both cases the sensor or chip temperature remains below 100°C during the getter activation process. Optionally, a mass spectrometer can be added for residual gas analysis during the sealing process
With the special tooling for each different package to be processed a precise package/lid alignment is achieved. Depending on the package size, a load per run can go up to 28 devices. To achieve multiple times higher throughput the getter system can be
integrated into a glove box system including several baking ovens. When using the glove box option ATV can warrant that the process can be performed in a dry and oxygen free atmosphere.
The SRO-706 Getter is a result of in-depth cooperation with our customer base and listing to the needs of the market as you may expect form ATV.
ATV has over 40 years experience in designing, developing equipment and process know-how which underlines our philosophy offering premium equipment and services to the semiconductor and microelectronics industry. Our scientists and support
team are dedicated to help our users getting the best return from investment of the ATV equipment.
Facts SRO-706 Getter
Technical information and figures
Technical Data SRO-706 Getter
960 x 720 x 1340mm (LxWxH)
240kg (options dependent)
950 – 1050mm adjustable
313 x 240mm
Chamber Lid Open/Closing:
Manual open/close; Automatic lock/un-lock
IR Lamp array within quartz tubes
Top Heater IR Lamp array within quartz tubes (in chamber lid integrated)
6; PID controlled
Cooling water supply:
Cold wall technology: Inlet max. 4bar; diff. pressure min. 2bar
3 x 400VAC, 32A, 19kW, 50-60Hz, TN-C-S (other power options available)
Common Applications SRO-706 Getter
Package sealing with high vacuum encapsulation
MEMS Cap/package lid sealing
Thermal & electrical getter activation
Features SRO-706 Getter
Maximum temperature: 450°C/500°C
High vacuum capability: <1 x 10-6 mbar
Package and lid separated during high vacuum getter activation
Water cooled shutters in between
Package/die temperature < 100°C while 450°C lid/window temperature
RGA data right after sealing: < 4 x 10-3 mbar with getter material
RGA data long time after sealing: < 4 x 10-4 mbar with getter material
Air leak rate after 30 years: < 3 x 10-16 mbar l/s with getter material
Options SRO-706 Getter
RGA/ Mass spectrometer
Glovebox integration for multiple times throughput
20 Watt/Package constant DC current supply for electrical getter activation
Custom tailored package/lid tooling/fixtures
Noble gas atmosphere
Chamber pressure control
Heated chamber walls
Earth quake protection
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