PACKAGE SOLDERING
SRO-Getter
Programmable solder reflow oven
The SRO-Getter from ATV is designed to seal packages with Kovar caps or optical windows for gyroscopes, microbolometers, and MEMS devices under high vacuum. It can used for R&D and in production lines. The device features top and bottom IR heating, with two independently monitored and controlled heating zones, providing uniform heating up to 450°C, while the sensor or chip temperature remains below 100°C during the getter activation process. The SRO-Getter, designed in response to customer feedback and market demands, is equipped with a special tooling for each package size, enabling precise package/lid alignment. Additionally, a mass spectrometer can be added as an option to the system for residual gas analysis during the sealing process.
Facts & Options
Information Request
Highlights
SRO-Getter
- High vacuum capability
- Independent temperature control of lid and package
- Process temperature up to 450°C
- Package and lid separated during high vacuum getter activation
- Multiple TC monotoring
- RGA system for gas analysis (optional configuration)
Common Applications
SRO-Getter
- Package sealing with high vacuum encapsulation
- Thermal getter activation
- MEMS Cap / package lid sealing:
- Microbolometers
- IR detectors
- Gyroscopes
Technical Data
SRO-Getter
depending on system configuration/optionals
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Dimensions
- 960 x 720 x 1340mm (LxWxH)
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Weight
- 240kg
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Working Height
- 1028mm +/- 20mm adjustable
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Heated Area
- 310 x 239mm
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Heating Method
- 2 arrays of 12 IR lamps in 3 zones each
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Temperature
- Process temperature up tp 450°C
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Vacuum Level
- 10-6 mbar
Options
SRO-Getter
- RGA / Mass spectrometer
- Custom substrate fixture
- Additional gas liners
- Chiller
SRO-Getter
Programmable solder reflow oven
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