ATV PRODUCTS
PACKAGE SOLDERING
SRO-GETTER
PROGRAMMABLE SOLDER REFLOW OVEN FOR HIGH VACUUM PACKAGE LID SEALING AND THERMAL GETTER ACTIVATION
The SRO-Getter from ATV is designed to seal packages with Kovar caps or optical windows for gyroscopes, microbolometers, and MEMS devices under high vacuum. It can be used for R&D and in production lines. The device features top and bottom IR heating with two independently monitored and controlled heating zones. It can heat uniformly up to 450°C and keeps the sensor or chip temperature below 100°C during the getter activation process. The SRO-Getter is equipped with a special tooling for each package size, enabling precise package/lid alignment. Additionally, a mass spectrometer can be added as an option to the system for residual gas analysis during the sealing process.
Facts & Options about our SRO-Getter Programmable Solder Reflow System with Getter Activation
HIGHLIGHTS SRO-GETTER
- High vacuum capability
- Independent temperature control of lid and package
- Process temperature up to 450°C
- Package and lid separated during high vacuum getter activation
- Multiple TC monitoring
COMMON APPLICATIONS SRO-GETTER
- Package sealing with high vacuum encapsulation
- Thermal getter activation for MEMS devices:
- Microbolometers
- IR detectors
- Gyroscopes
- Sensors
- High Power LED
- CPV, Laser bar
- Hybrid Assembly
TECHNICAL DATA SRO-GETTER
depending on system configuration/optionals
- Dimensions
- 960 x 720 x 1340mm (LxWxH)
- Weight
- 240kg
- Working Height
- 1028mm +/- 20mm adjustable
- Heated Area
- 310 x 239mm
- Heating Method
- 2 arrays of 12 IR lamps in 3 zones each
- Temperature
- Process temperature up to 450°C
- Vacuum Level
- 10-6 mbar
OPTIONS SRO-GETTER
- Custom tailored package fixture
- Spring clamps on hot plate
- Closed loop water chiller/heater