ATV PRODUCTS

SYSTEMS FOR SEMICONDUCTOR APPLICATIONS

Our current product portfolio includes high-precision vacuum reflow systems, including the SRO-i-Line optimized for mass production, for soldering in microelectronics, programmable quartz tube furnaces for demanding semiconductor processes and compression bonding systems for soldering components of different heights – specially developed for applications in research and development as well as for pilot lines. We offer customized solutions for all devices, both in terms of hardware and for the respective process-specific requirements of our customers.

REFLOW SOLDERING

SRO-700

  • R&D vacuum reflow system
  • IR heating
  • Versatile process applications
  • Easy to use

SRO-716

  • R&D and pilot line production
  • IR heating
  • Multiple system configurations
  • Easy process upscaling to SRO i-Line
  • Highly versatile

SRO i-LINE

  • High-Volume-Production
  • IR direct / indirect heating
  • Fast heating of complex heatsinks
  • Secure processing without product movement
  • Small footprint 

PACKAGE SOLDERING

SRO-Getter

  • High vacuum package lid sealing
  • Thermal getter activation
  • Hermetic sealing
  • Thermal isolation of product during getter activation

QUARTZ TUBE FURNACE

PEO-604

  • Multipurpose quarz tube furnace 
  •  R&D, pilot line and mass production
  • Wafer size up to 200 mm
  •  Easily exchangable quarz liners
  • Highly versatile

OUR SRO-SYSTEMS

SRO-700SRO-716SRO-GETTERSRO-TCBSRO i-LINE
FORMIC ACID
INERT GAS
SOLDER PASTE
H / FORMING GAS
OVER PRESSURE
HIGH VACUUM
HEATED SURFACE (APPROX. IN MM)230 X 220310 X 310310 X 240230 X 220380 X 410
TOP HEATER