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    Process Solutions

    by production process

     

    ATV Solutions – Process Based

     

    Discover the latest technological achievements for vacuum reflow systems at ATV Technologie.

    Choose from our unique solutions by process or application.

    Click on the link to get detailed information on every single product.

    Vacuum Soft Soldering/Reflow

    formic acid
    inert/noble gas
    solder paste/flux managment
    H2, N2H2 safety feature 
    ArH2 plasma
    positive pressure: 0,3 Mpa
    ​

    Sintering  <1100°C

    constrained LTCC sintering
    pressure assisted sintering
    LTCC embossing
    glass imprinting
    pressureless sintering

    Vacuum Soft Soldering/Reflow

     high vacuum < 5x10-5 mbar with 0.3MPa
     high vacuum < 5x10-6 mbar
    low vacuum < 5x10-2mbar
    double side heating
    up to 1000°C
    single wafer processing 
    lift pins
    feed through

    Thermo Compression Bonding <450°C

    transient liquide phase soldering
    Ag sintering
    Cu pillar soldering

    LP CVD

    CNT
    Graphene, Si3N4
    Poly-Si, Epitaxy
    Teos, LTO, HTO
    Trans LC

    Curing

    Polymide
    BCB

    Thick film conductor paste firing

    Pt, Au, AgPd
    Ag paste/ink firing
    resistor paste
    dielectric/glass paste
    thick copper conductor paste
    dry clean air/N2 atmosphere

    ALD

    ALD-808-HT
    AL2O3, TiN
    AlN, TiO2
    TaN, SiN

    Scribing

    glass
    Si, A2O3
    AIN

    Vacuum Brazing

    glass sealing
    high temperature alloys
    N2 atmosphere
    H2 atmosphere
    high vacuum
    rapid thermal brazing/sealing

    Diffusion

    gas source diffusion
    solid source diffusion

    Thermal Oxidation/Annealing

    wet/dry oxidation
    VCSEL
    high vacuum
    H2 atmosphere
    inert/noble/reactive gas
    ultra 3D temperature uniformity
    5 tunable heater zones
    post implanting annealing
    Trans LC

    High Vacuum Enclosing

    Package sealing with high vacuum encapsulation

    MEMS Cap/package lid sealing

    Micro Bolometers

    IR detectors

    Gyroscopes

    Thermal & electrical getter activation

    ATV-Technologie GmbH

    Entwicklung und Vertrieb von Maschinen und Geräten für die Mikroelektronik

    Johann-Sebastian-Bach-Str. 38

    85591 Vaterstetten

    Germany

    Phone: +49 (0)8106-3050-0

    Fax: +49 (0)8106-3050-99

    info {at} atv-tech.de

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