Quick look at: PHP-630
LTCC SINTERING PRESS
ATV is known by manufacturing the multipurpose fast ramping furnaces since 1982. The PEO series with single quartz tube is a perfect example for our success. It was originally developed for thick film paste firing but lately used for LTCC sintering. In 1992 ATV produced their first LTCC Sintering press for constrained LTCC sintering based on the PEO experience.
With the new device development ATV launched their new PHP-630 LTCC Sintering Press based upon the PEO 603 quartz tube furnace. With a press force of 500N up-to 50KN and a resolution of only 100N, ATV targets the market when low pressure force is required.
ATV’s competence in temperature based semiconductor processes, the PHP-630 can reach excellent process results with temperature starting from 250°C to 1 100°C. If required the high temperature system of 1100°C can be applied as an option. The PHP-630 has a control deviation of < ± 0,5K at temperatures higher than 350°C, a temperature uniformity of < 6K on a substrate size of 8” x 8”and an in situ controlled shrinkage resolution of the Z-axis of only 5µm.
With the PHP-630 LTCC Sintering Press, ATV has a well thought system which has a wide application field in this market. Also the ability of working with a variety of topographies and ATV`s unique has a pneumatically driven pressure unit to achieve ultra-smooth and uniform force control over the full substrate surface. The PHP-630 can operate in pressure mode but also in a pressure less mode for non-constrained sintering, thick film paste firing or annealing. This versatile system can be applied in R&D as well for low to medium volume production.
Technical information and figures
Technical Data PHP-630
1040 x 1250 x 1990 mm (L x W x H)
685kg (options dependent)
Product max. size:
200 x 200 mm
8 resistive heater rods and 2 heater disks
Air cooling DIN 125
Exhaust DIN 100
Inlet max. 4bar; differential pressure min. 2bar
2slm tap water/10%glycole
3 x 400VAC 50/60Hz; 32A
Features Data PHP-630
Low Power consumption 4kW @ 1000°C
Zero % LTCC X/Y shrinkage
Heating Rate: < 70min. to 1000°C (empty chamber)
Cooling Rate: < 90min. from 1000°C to 100°C (empty chamber)
250°C – 1 100°C, under vacuum up to max. 1 000°C
Accuracy < ±0,5°C > 350°C
Pressure up to 50kN
100N controlled resolution
500N minimal pressure force
PLC based 100 step recipe program
Pneumatic driven Press assembly
In-Situ measurement for inclination angle
In-Situ shrinkage monitoring
Recipe controlled atmosphere: O2 down to N2 supply quality; > 1 mbar
Recipe controlled pressure less mode
Common Applications PHP-630
Constrained LTCC Sintering
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