Quick look at: PEO-601
MULTIPURPOSE TABLE TOP FAST RAMPING FURNACE
Since 1982 ATV is manufacturing the multipurpose table top fast ramping furnaces PEOs series with single quartz tube. It was initially developed for thick film paste firing. Since that a large variety of new and different processes and applications was and is still being added. ATV applies its PEO series successfully also in semiconductor market segment.
The PEO series is ideal tool for R&D purposes. It can be applied easily for new unique and sophisticated process development as well low to medium volume production applications. This multipurpose furnace has several key aspects integrated and can handle wafers up to 100mm.
Next to floor space saving advantages the PEO also has Zero energy usage in ambient stand-by. Another unique aspect of the system is the multi process capability when using our easy exchangeable Liners. To reach the optimal temperature uniformity ATV uses 14 Kanthal heating elements which are positioned around, at the front and on back side the process tube and are PID controlled
Technical information and figures
Technical Data PEO-601
710 x 650 x 450mm (LxWxH)
Inner Quartz tube:
Standard Product Temperature:
Up to 40 wafers, 100mm diameter
3Phases, 230/400V, 16A, max.7kW
Common Applications PEO-601
Solid Source Diffusion
LTCC Sintering, Thick film paste sintering
Floor space saving by small foot print
Energy saving by zero at ambient standby
Max 40 wafer/process run
Up to 100mm wafers
Easily exchangeable quartz In Liners
Up to 1.000°C within 15 minutes
Down to < 100°C in less than 60 minutes
1K per 100 minutes (slowest ramping speed)
Temperature range 150°C to 1.100°C
Low temperature processing by gas preheating
Ultimate vacuum < 5 x 10-1 mbar
He leak rate: < 5 x 10-8 mbar l/s
O2 < 5 ppm
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Documents "to go"
DI water bubbler
Additional gas line
High temperature (1100°C)
Gas supply safety interface
Quartz dummy wafer