601 solid source

Quick look at: PEO-601


Since 1982 ATV is manufacturing the multipurpose table top fast ramping furnaces PEO series with single quartz tube. It was initially developed for thick film paste firing. Since that a large variety of new and different processes and applications was and is still being added. ATV applies its PEO series successfully also in semiconductor market segment. 


The PEO series is ideal tool for R&D purposes. The PEO-601 can be applied easily for new unique and sophisticated process development as well low volume production applications. This multipurpose furnace has several key aspects integrated and can handle wafers up to 100mm.


Next to floor space saving advantages the PEO also has close to Zero energy usage in ambient stand-by. Another unique aspect of the system is the multi process capability when using our easily exchangeable liners. To reach the optimal temperature uniformity ATV uses 14 Kanthal heating elements which are positioned around, at the front and on back side the process tube and are PID controlled


Facts PEO-601

Technical information and figures

Technical Data PEO-601

depending on system configuration


710 x 650 x 450mm (LxWxH)



47kg (minimum configuration)

Inner Quartz tube: 

112mm (4-1/2”)

Maximum Product Temperature:    

1.000°C continuously

Flat Zone:    

Up to 40 wafers, 100mm diameter

Power connection:    

3Phases, 230/400V, 16A, max.7kW

Common Applications PEO-601

depending on system configuration


Solid Source Diffusion

Wet/Dry Oxidation

SiAl/SiAu/SiMo alloying


  • Inert/Atmosphere

Polyimide, Curing/Baking

LTCC Sintering, Thick film paste sintering 

Features PEO-601

depending on system configuration/optionals 

Floor space saving by small foot print

Energy saving by close to zero at ambient standby

Max 40 wafer/process run 

Up to 100mm wafers

Easily exchangeable quartz In Liners

Low temperature processing by gas preheating

100 steps/program


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Options PEO-601

Additional values depending on application and final configuration

DI water bubbler

Vacuum annealing

Additional gas line

Gas supply safety interface

Vacuum pump

Wafer carriers

Quartz dummy wafer

Quartz In-Liner