Since 1982 ATV is manufacturing the multipurpose table top fast ramping furnaces PEO series with single quartz tube. It was initially developed for thick film paste firing. Since that a large variety of new and different processes and applications was and is still being added. ATV applies its PEO series successfully also in semiconductor market segment. 

The PEO series is ideal tool for R&D purposes. The PEO-601 can be applied easily for new unique and sophisticated process development as well low volume production applications. This multipurpose furnace has several key aspects integrated and can handle wafers up to 100mm.

Next to floor space saving advantages the PEO also has close to Zero energy usage in ambient stand-by. Another unique aspect of the system is the multi process capability when using our easily exchangeable liners. To reach the optimal temperature uniformity ATV uses 14 Kanthal heating elements which are positioned around, at the front and on back side the process tube and are PID controlled

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