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The thermal insulation around
the chamber is rated for 1400°C
operation. It is split into
2 halves with a slot on each
side. Rapid temperature controlled
cool down is performed by a
blower which draws room air
through the slots cooling the
outside of the quartz tube,
heaters, and the thermal insulation.
Maximum cool down can be achieved
in less than one hour from 1100°C
to below 100°C. There is
no cooling air flow during normal
operation. The standard furnace
is equipped with 2 programmable
gas lines with manually adjustable
flow meters. The standard plumbing
is stainless steel with Swagelok®
fittings. Additional gas lines,
Mass Flow Controllers (MFC),
gas panels, and VCR® fittings
with orbital welded stainless
steel piping are available options.
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| The water cooled
Viton® seals on the PEO-603/612
and later models allows a He
leak rate ~ 10 -9 mbar l/s with
a final vacuum < 5 x 10 -6
mbar and oxygen level is in
the range of 1 ppm. The small
size of the PEOs (approximately
1m x 1m x 1m) significantly
saves floor space and makes
stacking two furnaces possible.
The processing method of loading
the furnace at room temperature,
ramping up, dwell/soak, processing,
and rapidly cooling down saves
energy since there is no consumption
during standby. |
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