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The PEO 600 series furnaces
are constructed to be space
saving, energy efficient units
that can complete multiple tasks.
Each is equipped with a quartz
tube sealed by a quartz door
bell jar mounted on a spring-loaded
tumbling plate on the door.
This design ensures a leak proof
sealing when closed. Ball-bearing
shafts guide the manual opening
and closing of the furnace door,
which is locked during operation.
Various easy to replace carriers
are inserted at quartz hinges
at the door bell jar.
By closing/opening the furnace
the sub-strates are moved in/out.
An automated open/close door
is an available option. At the
end of the process tube there
is a stainless steel block with
KF ports for gas out let, gas
injection and vacuum pumps.
Gas flow is from front through
door bell jar to rear side.
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from rear to front and back.
With easy to replace quartz
glass in liners/elephants multiple
processes can be performed in
one furnace without cross contamination.
The furnace is heated by 12
Kanthal® resistor wire heaters
suitable for temperatures up
1450°C. Ceramic shafts,
wrapped in Kanthal® wire
form 3 individually programmable
heating zones around the process
tube. In addition, the oven
contains one resistor wire disk
heater in the door bell jar
and a second one at the far
which significantly increases
the usable flat zone of the
furnace. Temperature profiling
with thermocouple substrates
or wafers and fine tuning of
each of the available 5 heater
zones provides optimal temperature
uniformity for any process. |
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