Oxidation

Diffusion

LPCVD

MOCVD

Annealing

Alloying

Atomic Layer Deposition

Carbon
Nano Tubes

Polyimide Curing

Wafer Bump
Reflow

Thick Film Paste

LTCC Sintering
Wafer Bump Reflow
Batch process

Batch process		  
single wafer process

single wafer process
in the Perfect Soldering/RTA system
with manual or automatic wafer handling
 
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