 |
Furnace front side
installed in clean room wall.
PerSys Hydro Steam Model HS
81
Multi-Purpose Steam Generator
•
From very low to high H2 gas
flow (0.05 – 15 slm)
• Steam
concentrations: 4%-100% for
O2 rich,
1%-100%
for H2 rich
•
Unique injector design, NO devitrifying
quartz glass
•
Safe & controlled operation
with full redundancy
•
Short & centered flame monitored
by UV detector
•
Wet / Dry oxidation processes
• DCE
oxidation to HCl (DCE/O2 pre
mix) |
|
Furnace rear side with Hydrogen
Torch
and exhaust installed in grey
room area.
 |
