ATV Technology


	Oxidation Diffusion LPCVD MOCVD Annealing Alloying Atomic Layer Deposition Carbon Nano Tubes Polyimide Curing Wafer Bump Reflow Thick Film Paste LTCC Sintering

Oxidation: Wet Si Oxidation With H2O Bubbler


	Wet Si Oxidation with H2O bubbler, 2 liters, including temperature controlled heater and one additional gas line with PTFE valve, bubble gas input via rear side of furnace through the KF 63.

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