Oxidation

Diffusion

LPCVD

MOCVD

Annealing

Alloying

Atomic Layer Deposition

Carbon
Nano Tubes

Polyimide Curing

Wafer Bump
Reflow

Thick Film Paste

LTCC Sintering
MOCVD: ZrO2
LPCVD furnace front side

LPCVD furnace front side with easy
to replace quartz glass in liner/elephant. 		 
LPCVD furnace rear side

LPCVD furnace rear side
with gas panel and vacuum pump.
 
  Ultrathin Zirconium Dioxide Chemically Deposited at a Low Thermal Budget
  Metal-organic chemical vapor deposition and nanoscale characterization...
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