Oxidation

Diffusion

LPCVD

MOCVD

Annealing

Alloying

Atomic Layer Deposition

Carbon
Nano Tubes

Polyimide Curing

Wafer Bump
Reflow

Thick Film Paste

LTCC Sintering
LPCVD: TEOS, LTO, PSG, BSG, Poly Silicon (doped/undoped), Silicon Nitride
LPCVD furnace front side

LPCVD furnace front side with easy
to replace quartz glass in liner/elephant. 		 
LPCVD furnace rear side

LPCVD furnace rear side
with gas panel and vacuum pump.
     
 
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