Oxidation

Diffussion

LPCVD

MOCVD

Annealing

Alloying

Atomic Layer Deposition

Carbon
Nano Tubes

Polyimide Curing

Wafer Bump
Reflow

Thick Film Paste

LTCC Sintering
Diffussion: Spin on Dopand, Solid Sources, POCl3, BBr3, PH3, B2H6, AsH3, Aluminum


Diffusion furnace front side with easy to
replace quartz glass in liner/elephant.		  
     
 
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