Oxidation

Diffusion

LPCVD

MOCVD

Annealing

Alloying

Atomic Layer Deposition

Carbon
Nano Tubes

Polyimide Curing

Wafer Bump
Reflow

Thick Film Paste

LTCC Sintering
Carbon Nano Tubes
LPCVD furnace front side

LPCVD furnace front side with easy
to replace quartz glass in liner/elephant. 		 
LPCVD furnace rear side

LPCVD furnace rear side
with gas panel and vacuum pump.
 
  Controlled CVD-Growth of Multi-walled CNTs
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ATV Technologie GmbH | 85591 Vaterstetten | Germany | Tel +49-8106-3050-0 | Fax +49-8106-3050-99 |
  
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